Excellis Pte Limited has been appointed as Asia representative of Inspectrology LLC since January 1, 2013
Inspectrology is headquartered in Massachusetts USA. Inspectrology provides Metrology and Wafer Inspection equipment systems to Semiconductor, Microelectromechanical systems (MEMS), Compound Semiconductor (GaAs, GaN, SiC, SOI etc), LED (Light Emitting Diode) and Solar Fabs.
We carry a complete line of new and rebuilt IVS Metrology Systems. IVS Metrology systems have been providing reliable, robust measurements to fabs world wide for over 30 years.
Replacement parts for the entire line of IVS Metrology Systems are available at competitive prices. All mechanical parts for the IVS system are rebuilt to new manufacturer specifications in house by our own highly trained IVS system engineers.
IVS200 CD and Overlay Metrology
The cornerstone of the IVS200 unbeatable reliability and stability is its mean-time between failure (MTBF) of 2100 hours. The IVS200 leads the industry, ensuring optimal system availability and years of problem-free operation. The robust design of the wafer handling and navigation system requires no operator assistance during recipe execution. Recipes and data remain stable over time.
Versatile wafer handling accommodates many variations in wafer composition including silicon carbide, quartz, glass, GaAs, GaN, and slotted wafers of various sizes. Square substrates are also supported.
The IVS200 delivers unparalleled measurement performance on all layers with CD and overlay measurements in the same recipe. Specific algorithms for MEMS applications allow for measurement of a wide array of MEMS structures. The proven capabilities of the IVS200 to perform with high precision and rock solid reliability set this system apart.
Reputation built on 30 years proven capability of IVS100 series platform
Smallest foot print with multi-type measurements
Structural CD metrology
Overlay & CD measurements in the same recipe
Off-line recipe development
MTBF 2100 hours
All legacy IVS1xx models are upgradable to IVS200
We provide comprehensive services:
· Hardware Spare Parts Supply
· Hardware Repair/Exchange
· PM Consumable parts
(Inspected Microscope Illuminator,
Harden HRC material Robot Effector Arm)
· Maintenance Contracts
· On-site Repair
· Preventive Maintenance
· Maintenance & Applications Training
(In-depth Training for self-sustainable mode)
· On-site Installation
· Equipments Trade-In
(To Sell and To Buy)
· Cybeq / IDE Prealigner Robot
· Application Support
(Process Qualification, Matching Issue, Micron-Per-Pixel Conversion)
IVS120 / IVS130 / IVS135 / IVS155 / IVS185 Remanufactured CD and Overlay Metrology